Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Characterization and Metrology for ULSI Technology: 2005

Published

Author(s)

David G. Seiler, Alain C. Diebold, Robert McDonald, Caroline Ayre, Rajinder P. Khosla, Stefan Zollner, Erik M. Secula
Citation
Characterization and Metrology for ULSI Technology: 2005
Volume
788
Publisher Info
American Institute of Physics, Melville, NY

Citation

Seiler, D. , Diebold, A. , McDonald, R. , Ayre, C. , Khosla, R. , Zollner, S. and Secula, E. (2005), Characterization and Metrology for ULSI Technology: 2005, American Institute of Physics, Melville, NY (Accessed March 28, 2024)
Created September 28, 2005, Updated January 27, 2020