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Characterization and Metrology for ULSI Technology: 2005

Published

Author(s)

David G. Seiler, Alain C. Diebold, Robert McDonald, Caroline Ayre, Rajinder P. Khosla, Stefan Zollner, Erik M. Secula
Citation
Characterization and Metrology for ULSI Technology: 2005
Volume
788
Publisher Info
American Institute of Physics, Melville, NY

Citation

Seiler, D. , Diebold, A. , McDonald, R. , Ayre, C. , Khosla, R. , Zollner, S. and Secula, E. (2005), Characterization and Metrology for ULSI Technology: 2005, American Institute of Physics, Melville, NY (Accessed April 14, 2024)
Created September 28, 2005, Updated January 27, 2020