TY  - SER
AU  - David Seiler
AU  - Alain Diebold
AU  - Robert McDonald
AU  - Caroline Ayre
AU  - Rajinder Khosla
AU  - Stefan Zollner
AU  - Erik Secula
C2  - American Institute of Physics, Melville, NY
DA  - 2005-09-28
LA  - en
M1  - 788
PB  - American Institute of Physics, Melville, NY
PY  - 2005
TI  - Characterization and Metrology for ULSI Technology: 2005
ER  -