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Characterization and Metrology for ULSI Technology: 2000

Published

Author(s)

David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, R. C. McDonald, W M. Bullis, P. J. Smith, Erik M. Secula
Citation
Characterization and Metrology for ULSI Technology: 2000
Volume
550
Publisher Info
American Institute of Physics, Melville, NY

Citation

Seiler, D. , Diebold, A. , Shaffner, T. , McDonald, R. , Bullis, W. , Smith, P. and Secula, E. (2001), Characterization and Metrology for ULSI Technology: 2000, American Institute of Physics, Melville, NY (Accessed June 18, 2024)

Issues

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Created February 1, 2001, Updated February 17, 2017