Seiler, D.
, Diebold, A.
, Shaffner, T.
, McDonald, R.
, Bullis, W.
, Smith, P.
and Secula, E.
(2001),
Characterization and Metrology for ULSI Technology: 2000, American Institute of Physics, Melville, NY
(Accessed October 7, 2024)
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Characterization and Metrology for ULSI Technology: 2000
Published
Author(s)
, Alain C. Diebold, , R. C. McDonald, W M. Bullis, P. J. Smith,
Citation
Characterization and Metrology for ULSI Technology: 2000
Volume
550
Publisher Info
American Institute of Physics, Melville, NY
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 1, 2001, Updated February 17, 2017