@book{48726,
  author = {David Seiler and Alain Diebold and Thomas Shaffner and R. McDonald and W Bullis and P. Smith and Erik Secula},
  title = {Characterization and Metrology for ULSI Technology: 2000},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}