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Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt
Citation
SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX

Citation

Olthoff, J. and Van Brunt, R. (1993), Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic, SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21541 (Accessed April 18, 2024)
Created July 31, 1993, Updated October 12, 2021