Olthoff, J.
and Van Brunt, R.
(1993),
Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic, SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21541
(Accessed September 19, 2024)
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Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic
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SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX
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Created July 31, 1993, Updated October 12, 2021