@misc{768321, author = {James Olthoff and Richard Van Brunt}, title = {Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic}, year = {1993}, month = {1993-08-01 00:08:00}, publisher = {SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21541}, language = {en}, }