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Characteristic Impedance Measurement of Planar Transmission Lines



Uwe Arz, Dylan Williams, Hartmut Grabinski


In this paper we investigate a simple, robust and general method to determine the characteristic impedance of planar transmission lines based on calibration comparison. We apply the method to different types of planar transmission lines like CPW and microstrip on lossless substrates, and to lines on lossy silicon typical of high-speed interconnects including VLSI interconnects.
Conference Dates
August 17-24, 2002
Conference Location
Maastricht, 1, NL
Conference Title
2002 URSI General Assembly


characteristic impedance, on-wafer measurement, planar transmission lines


Arz, U. , Williams, D. and Grabinski, H. (2002), Characteristic Impedance Measurement of Planar Transmission Lines, 2002 URSI General Assembly, Maastricht, 1, NL, [online], (Accessed June 23, 2024)


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Created August 16, 2002, Updated October 12, 2021