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Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices

Published

Author(s)

Eric M. Vogel, George A. Brown
Proceedings Title
Characterization and Metrology for ULSI Technology: 2003
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX, USA
Conference Title
2003 International Conference on Characterization and Metrology for ULSI Technology

Citation

Vogel, E. and Brown, G. (2003), Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices, Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA (Accessed June 22, 2024)

Issues

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Created September 29, 2003, Updated October 12, 2021