Vogel, E.
and Brown, G.
(2003),
Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices, Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
(Accessed July 27, 2024)
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Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices
Published
Author(s)
, George A. Brown
Proceedings Title
Characterization and Metrology for ULSI Technology: 2003
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX, USA
Conference Title
2003 International Conference on Characterization and Metrology for ULSI Technology
Pub Type
Conferences
Citation
Issues
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Created September 29, 2003, Updated October 12, 2021