TY  - CONF
AU  - Vogel, Eric
AU  - Brown, George
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
PY  - 2003
TI  - Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices
ER  -