Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion



Svetlana Avramov-Zamurovic1, Jae M. Yoo, Nicholas Dagalakis


This paper describes the design of a very simple displacement sensor that measures the displacement of an object by measuring the change in capacitance due to the movement of this object in the sensor fringing electric field. Two sensor geometries with small footprint were considered and several sensor variations were built and tested. At distances of approximately 0.5 μm and 30 μm test results demonstrated that sensors' resolution is in the order of tens of nanometers.
Journal of Sensors and Actuators Networks


Sensors, capacitance measurement, displacement measurement, nano-size positioners, nanotechnology, sensitivity, rheometer


Avramov-Zamurovic1, S. , Yoo, J. and Dagalakis, N. (2016), Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion, Journal of Sensors and Actuators Networks, [online], (Accessed June 14, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created May 31, 2016, Updated October 12, 2021