Avramov-Zamurovic1, S.
, Yoo, J.
and Dagalakis, N.
(2016),
Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion, Journal of Sensors and Actuators Networks, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919066
(Accessed May 8, 2024)
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Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion
Published
Author(s)
Svetlana Avramov-Zamurovic1, ,
Abstract
This paper describes the design of a very simple displacement sensor that measures the displacement of an object by measuring the change in capacitance due to the movement of this object in the sensor fringing electric field. Two sensor geometries with small footprint were considered and several sensor variations were built and tested. At distances of approximately 0.5 μm and 30 μm test results demonstrated that sensors' resolution is in the order of tens of nanometers.Citation
Journal of Sensors and Actuators Networks
Volume
87
Pub Type
Journals
Download Paper
Keywords
Sensors, capacitance measurement, displacement measurement, nano-size positioners, nanotechnology, sensitivity, rheometer
Citation
Issues
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Created May 31, 2016, Updated October 12, 2021