Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion
Svetlana Avramov-Zamurovic1, Jae M. Yoo, Nicholas Dagalakis
This paper describes the design of a very simple displacement sensor that measures the displacement of an object by measuring the change in capacitance due to the movement of this object in the sensor fringing electric field. Two sensor geometries with small footprint were considered and several sensor variations were built and tested. At distances of approximately 0.5 μm and 30 μm test results demonstrated that sensors' resolution is in the order of tens of nanometers.
, Yoo, J.
and Dagalakis, N.
Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion, Journal of Sensors and Actuators Networks, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919066
(Accessed December 4, 2023)