TY  - JOUR
AU  - Svetlana Avramov-Zamurovic1
AU  - Jae Yoo
AU  - Nicholas Dagalakis
C2  - Journal of Sensors and Actuators Networks
DA  - 2016-06-01 00:06:00
LA  - en
M1  - 87
PB  - Journal of Sensors and Actuators Networks
PY  - 2016
TI  - Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919066
ER  -