@article{807171,
  author = {Svetlana Avramov-Zamurovic1 and Jae Yoo and Nicholas Dagalakis},
  title = {Capacitive Displacement Sensor for Detecting Planar Submicrometer Motion},
  year = {2016},
  number = {87},
  month = {2016-06-01 00:06:00},
  publisher = {Journal of Sensors and Actuators Networks},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919066},
  language = {en},
}