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The capabilities and limitations of auger sputer profiling for studies of semiconductors:

Published

Author(s)

S A Schwarz, C R Helms, W E Spicer, N J Taylor
Citation
- NBS SP 400-67
Report Number
NBS SP 400-67

Citation

Schwarz, S. , Helms, C. , Spicer, W. and Taylor, N. (1981), The capabilities and limitations of auger sputer profiling for studies of semiconductors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-67 (Accessed April 18, 2024)
Created January 1, 1981, Updated May 19, 2023