Schwarz, S.
, Helms, C.
, Spicer, W.
and Taylor, N.
(1981),
The capabilities and limitations of auger sputer profiling for studies of semiconductors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-67
(Accessed December 14, 2024)
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The capabilities and limitations of auger sputer profiling for studies of semiconductors:
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- NBS SP 400-67
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NBS SP 400-67
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NIST Pubs
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Created January 1, 1981, Updated May 19, 2023