@misc{1161691, author = {S A Schwarz and C R Helms and W E Spicer and N J Taylor}, title = {The capabilities and limitations of auger sputer profiling for studies of semiconductors:}, year = {1981}, month = {1981-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-67}, language = {en}, }