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Calibration Techniques for Scanning Microwave Microscopy



Thomas M. Wallis, Atif A. Imtiaz, Alexandra Curtin, Pavel Kabos, H. P. Huber, Joseph J. Kopanski, F. Kienberger


Two techniques are described for calibrating a scanning microwave microscope (SMM). The first technique enables spatially-resolved absolute capacitance measurements on the attofarad-to-femtofarad scale. The second technique enables profiling or dopant concentrations between 10 16 to 10 20 dopant atoms per CM3, notably, the sensitivity of the instrument to different dopant concentrations may be tuned by adjusting the SMM operating frequency, both calibration techniques involved the use of specialized reference samples, in conjunction with modeling and data analysis
Conference Dates
July 1-6, 2012
Conference Location
Washington, DC
Conference Title
Conference on Precision Electromagnetics Measurements


Calibration, Capacitance, Doping, Scanning probe Microscopy, semiconductor materials.


Wallis, T. , Imtiaz, A. , Curtin, A. , Kabos, P. , Huber, H. , Kopanski, J. and Kienberger, F. (2012), Calibration Techniques for Scanning Microwave Microscopy, Conference on Precision Electromagnetics Measurements, Washington, DC, [online], (Accessed May 26, 2024)


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Created July 1, 2012, Updated January 27, 2020