Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Calibration of Phosphorus Implantation Dose in Silicon by Radiochemical Neutron Activation Analysis

Published

Author(s)

Rick L. Paul, David S. Simons
Citation
Silicon Front-End Junction Formation Technologies (Materials Research Society Symposia Proceedings)
Volume
717
Publisher Info
Materials Research Society , Warrendale, PA

Citation

Paul, R. and Simons, D. (2002), Calibration of Phosphorus Implantation Dose in Silicon by Radiochemical Neutron Activation Analysis, Materials Research Society , Warrendale, PA (Accessed April 21, 2024)
Created August 1, 2002, Updated February 19, 2017