@book{79946,
  author = {Rick Paul and David Simons},
  title = {Calibration of Phosphorus Implantation Dose in Silicon by Radiochemical Neutron Activation Analysis},
  year = {2002},
  number = {717},
  month = {2002-08-01},
  publisher = {Materials Research Society , Warrendale, PA},
  language = {en},
}