Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Calibrating On-Wafer Probes to the Probe Tips

Published

Author(s)

Dylan F. Williams, Roger Marks

Abstract

This paper investigates the accuracy of on-wafer scattering-parameter calibrations at the probe tips. Data show the extent to which certain probe-tip calibrations are consistent with one another and applicable to the characterization of devices or circuits fabricated on different wafers or embedded in different transmission-line media. Calibrations to the probe tips are especially well suited to lower-frequency microwave measurements. Further results demonstrate conditions under which probe-tip calibrations fail.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Volume
22
Conference Dates
December 3-4, 1992
Conference Location
Orlando, FL

Citation

Williams, D. and Marks, R. (1992), Calibrating On-Wafer Probes to the Probe Tips, Tech Dig., Auto. RF Tech. Group Conf., Orlando, FL, [online], https://doi.org/10.1109/ARFTG.1992.327008 (Accessed June 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 1, 1992, Updated November 10, 2018