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Calibrating On-Wafer Probes to the Probe Tips



Dylan F. Williams, Roger Marks


This paper investigates the accuracy of on-wafer scattering-parameter calibrations at the probe tips. Data show the extent to which certain probe-tip calibrations are consistent with one another and applicable to the characterization of devices or circuits fabricated on different wafers or embedded in different transmission-line media. Calibrations to the probe tips are especially well suited to lower-frequency microwave measurements. Further results demonstrate conditions under which probe-tip calibrations fail.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
December 3-4, 1992
Conference Location
Orlando, FL


Williams, D. and Marks, R. (1992), Calibrating On-Wafer Probes to the Probe Tips, Tech Dig., Auto. RF Tech. Group Conf., Orlando, FL, [online], (Accessed June 23, 2024)


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Created December 1, 1992, Updated November 10, 2018