Calibrated Waveform Measurement with High-Impedance Probes
Pavel Kabos, Howard C. Reader, Uwe Arz, Dylan Williams
We develop an on-wafer waveform calibration technique that combines frequency-domain mismatch corrections to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit test. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.
IEEE Transactions on Microwave Theory and Techniques
, Reader, H.
, Arz, U.
and Williams, D.
Calibrated Waveform Measurement with High-Impedance Probes, IEEE Transactions on Microwave Theory and Techniques, [online], https://doi.org/10.1109/TMTT.2002.807842
(Accessed February 29, 2024)