Kabos, P.
, Reader, H.
, Arz, U.
and Williams, D.
(2003),
Calibrated Waveform Measurement with High-Impedance Probes, IEEE Transactions on Microwave Theory and Techniques, [online], https://doi.org/10.1109/TMTT.2002.807842
(Accessed October 20, 2025)
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Calibrated Waveform Measurement with High-Impedance Probes
Published
Author(s)
, Howard C. Reader, ,
Abstract
We develop an on-wafer waveform calibration technique that combines frequency-domain mismatch corrections to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit test. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.Citation
IEEE Transactions on Microwave Theory and Techniques
Volume
51
Issue
2
Pub Type
Journals
Download Paper
Keywords
calibration, high-impedance probe, on-wafer measurement, waveform measurement
Citation
Issues
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Created January 31, 2003, Updated October 12, 2021