Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Calibrated Waveform Measurement with High-Impedance Probes

Published

Author(s)

Pavel Kabos, Howard C. Reader, Uwe Arz, Dylan Williams

Abstract

We develop an on-wafer waveform calibration technique that combines frequency-domain mismatch corrections to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit test. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.
Citation
IEEE Transactions on Microwave Theory and Techniques
Volume
51
Issue
2

Keywords

calibration, high-impedance probe, on-wafer measurement, waveform measurement

Citation

Kabos, P. , Reader, H. , Arz, U. and Williams, D. (2003), Calibrated Waveform Measurement with High-Impedance Probes, IEEE Transactions on Microwave Theory and Techniques, [online], https://doi.org/10.1109/TMTT.2002.807842 (Accessed July 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 31, 2003, Updated October 12, 2021