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Calibrated Waveform Measurement with High-Impedance Probes



Pavel Kabos, Howard C. Reader, Uwe Arz, Dylan Williams


We develop an on-wafer waveform calibration technique that combines frequency-domain mismatch corrections to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit test. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.
IEEE Transactions on Microwave Theory and Techniques


calibration, high-impedance probe, on-wafer measurement, waveform measurement


Kabos, P. , Reader, H. , Arz, U. and Williams, D. (2003), Calibrated Waveform Measurement with High-Impedance Probes, IEEE Transactions on Microwave Theory and Techniques, [online], (Accessed February 29, 2024)
Created January 31, 2003, Updated October 12, 2021