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Broadband Permittivity Measurements of Thin-Film Ferroelectrics to 40 GHz

Published

Author(s)

Nathan D. Orloff, James C. Booth, Makoto Murakami, Ichiro Takeuchi

Abstract

We demonstrate a novel experimental technique to measure the complex permittivity function of dielectric thin films over the frequency range from 100 Hz to 40 GHz. We apply this technique to determine the broadband permittivity function for ferroelectric thin films such as PbTiO3 at room temperature. We discuss the value of such frequency-dependent measurements for determining the the dielectric response of ferroelectric thin films at finite frequencies.
Proceedings Title
Broadband Measurements of the Permittivity of Thin-Film Ferroelectrics to 40 GHz
Volume
2
Conference Dates
February 25-27, 2008
Conference Location
Santa Fe, NM
Conference Title
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium

Keywords

ferroelectric, permittivity, thin films

Citation

Orloff, N. , Booth, J. , Murakami, M. and Takeuchi, I. (2008), Broadband Permittivity Measurements of Thin-Film Ferroelectrics to 40 GHz, Broadband Measurements of the Permittivity of Thin-Film Ferroelectrics to 40 GHz, Santa Fe, NM, [online], https://doi.org/10.1109/ISAF.2008.4693752 (Accessed April 17, 2024)
Created February 25, 2008, Updated November 10, 2018