Broadband Permittivity Measurements of High Dielectric Constant Films

Published

March 1, 2006

Author(s)

Jan Obrzut, Nozaki R. AnopchenkoA

Abstract

Our investigation concerns measuring broadband dielectric permittivity and loss tangent of thin film high dielectric constant (high-k) dielectric materials at microwave frequencies. The measurements are made in an APC-7 coaxial configuration where the test specimen represents a load terminating an air-filled coaxial transmission line. In contrast to conventional lumped capacitance approximations, the parallel plate capacitor filled with a dielectric film is treated as a distributed component consisting of a depressive, transmission line with a capacitance. The model expression for input impedance takes into consideration the wave propagation within the dielectric specimen section and correlates the network parameters with the relative complex permittivity of the specimen. The method is suitable for testing high-k polymer-composite materials having nominal thickness of 1 mm to 300 mm at frequencies of 100 MHz to 12 GHz. With proper calibration and computation the frequency range can be extended to 18 GHz.

Proceedings Title

Instrumentation and Measurement Technolgy Conference| | | IEEE

Volume

90

Conference Dates

May 17-19, 2005

Conference Location

Ottawa, CA

Conference Title

Instrumentation and Measurement Technology Conference

Pub Type

Conferences

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Keywords

coaxial disontinuity, dielectric materials, high-frequency measurements

Citation

Obrzut, J. and AnopchenkoA, N. (2006), Broadband Permittivity Measurements of High Dielectric Constant Films, Instrumentation and Measurement Technolgy Conference| | | IEEE, Ottawa, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852509 (Accessed October 13, 2025)