Radovanov, S.
, Olthoff, J.
and Van Brunt, R.
(1991),
Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas, Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26841
(Accessed March 3, 2025)
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Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas
Published
Author(s)
S. B. Radovanov, ,
Proceedings Title
Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases
Conference Dates
July 8-12, 1991
Conference Location
Barga, 1, IT
Pub Type
Conferences
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Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created June 30, 1991, Updated October 12, 2021