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Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas

Published

Author(s)

S. B. Radovanov, James K. Olthoff, Richard J. Van Brunt
Proceedings Title
Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases
Conference Dates
July 8-12, 1991
Conference Location
Barga, 1, IT

Citation

Radovanov, S. , Olthoff, J. and Van Brunt, R. (1991), Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas, Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26841 (Accessed February 28, 2024)
Created June 30, 1991, Updated October 12, 2021