Novotny, D.
and Ciarlo, D.
(1978),
Automated photomask inspection:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-46
(Accessed December 2, 2024)
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Automated photomask inspection:
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Author(s)
,
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- NBS SP 400-46
Report Number
NBS SP 400-46
Pub Type
NIST Pubs
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Created January 1, 1978, Updated May 19, 2023