@misc{1161806,
  author = {Donald B Novotny and Dino R Ciarlo},
  title = {Automated photomask inspection:},
  year = {1978},
  month = {1978-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-46},
  language = {en},
}