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Automated Calibration of Scanning Probe Microscopy by Image Processing



J Jorgensen


The continuing drive within high technology industries to push dimensional tolerances to still smaller values motivates the use of surface measuring techniques with better resolution. This requirement can be met by the scanning probe microscopy (SPM) technique, which has the ability to resolve surface structures with atomic resolution. The types of measurements that can be addressed by SPM are, step heights, displacements and micro roughness by direct topographical measurements and micro hardness by analysis of hardness indentations. Such measurements are becoming important for quality control of motor parts, smooth optical surfaces, coatings and micro electronics. Inspired by the new opportunities given by SPM we have, in a project for the European Union, recently developed a number of calibration and measuring techniques based on image processing and we have defined a set of roughness and hardness parameters for three dimensional topographic images. This presentation will focus on the calibration aspects.
NIST Interagency/Internal Report (NISTIR) - 5668
Report Number


Jorgensen, J. (1995), Automated Calibration of Scanning Probe Microscopy by Image Processing, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 15, 2024)


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Created December 31, 1994, Updated October 12, 2021