Attenuation lengths of low-energy electrons in solids derived from the yield of proton-excited Auger electrons: beryllium and aluminum

Published

August 15, 1977

Author(s)

Cedric J. Powell, R Stein, J Needham, T J. Driscoll

Abstract

Values are reported for the absolute yields of KVV Auger electrons from beryllium and L₂₃VV Auger electrons from aluminum excited by 60- to 220-keV proton bombardment. The measurements were made using semi-infinite evaporated samples, and the results were used to derive effective values of the inelastic attenuation lengths for low-energy Auger electrons in the surface regions of the samples. The attenuation lengths determined using this technique were 6.1 Aring} for 100-eV electrons in Be and 1.9 Aring} for 67-eV electrons in Al. These effective attenuation lengths are appropriate for use in Auger-electron spectroscopy and x-ray photoelectron spectroscopy.

Citation

Physical Review B (Condensed Matter and Materials Physics)

Volume

16

Issue

4

Pub Type

Journals

Citation

Powell, C. , Stein, R. , Needham, J. and Driscoll, T. (1977), Attenuation lengths of low-energy electrons in solids derived from the yield of proton-excited Auger electrons: beryllium and aluminum, Physical Review B (Condensed Matter and Materials Physics) (Accessed October 14, 2025)