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Atom Probe Tomography using Extreme-Ultraviolet Light

Published

Author(s)

Luis Miaja Avila, Ann C. Chiaramonti Debay, Benjamin W. Caplins, David R. Diercks, Brian Gorman, Norman A. Sanford

Abstract

We present a different approach to laser-assisted atom probe tomography, where instead of using a near-UV laser for inducing a thermal transient, we use an extreme-ultraviolet coherent light source to trigger eld ion emission at the tip's apex. The use of extreme-ultraviolet photons in atom probe tomography opens the potential for an athermal eld ionization pathway.
Volume
11325
Issue
6
Conference Dates
February 24-27, 2020
Conference Location
San Jose, CA
Conference Title
SPIE Advanced Lithography

Keywords

Atom probe microscopy, extreme ultraviolet, high-harmonic generation
Created March 27, 2020, Updated May 27, 2020