In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterization. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration.
Conference Dates: August 17-24, 2002
Conference Location: Maastricht, NL
Conference Title: 2002 URSI General Assembly
Pub Type: Conferences
calibration comparison, on-wafer measurement, planar transmission lines