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Angularly-Selective Transmission Imaging in a Scanning Electron Microscope
Published
Author(s)
Jason D. Holm, Robert R. Keller
Abstract
This contribution presents recent advances in imaging control conditions for transmission scanning electron microscopy (t-SEM) by means of angularly-selective electron collection with a commercial scanning transmission electron microscopy-in-scanning electron microscope (STEM-in-SEM) detector. A modular aperture system that can enhance the imaging capabilities of nearly any transmission detector is described, and several imaging examples are provided.
Holm, J.
and Keller, R.
(2016),
Angularly-Selective Transmission Imaging in a Scanning Electron Microscope, Ultramicroscopy, [online], https://doi.org/10.1016/j.ultramic.2016.05.001
(Accessed March 28, 2024)