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Angularly-Selective Transmission Imaging in a Scanning Electron Microscope

Published

Author(s)

Jason D. Holm, Robert R. Keller

Abstract

This contribution presents recent advances in imaging control conditions for transmission scanning electron microscopy (t-SEM) by means of angularly-selective electron collection with a commercial scanning transmission electron microscopy-in-scanning electron microscope (STEM-in-SEM) detector. A modular aperture system that can enhance the imaging capabilities of nearly any transmission detector is described, and several imaging examples are provided.
Citation
Ultramicroscopy
Volume
167

Keywords

scanning electron microscopy, high-angle annular dark-field, HAADF, transmission scanning electron microscopy, t-SEM, SEM, STEM-in-SEM, aperture, transmission detector
Created May 5, 2016, Updated November 10, 2018