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PUBLICATIONS

Analog BIST Functionality for Microhotplate Temperature Sensors

Published

Author(s)

Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Kenneth G. Kreider, Jon C. Geist

Abstract

In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration.
Citation
IEEE Electron Device Letters
Volume
30
Issue
9
Pub Type
Journals

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Keywords

Microhotplate, Calibration, Temperature sensor, BIST, Platinum-Rhodium, Thermocouple
Metrology

Citation

Afridi, M. , Montgomery, C. , cooper-Balis, E. , Semancik, S. , Kreider, K. and Geist, J. (2009), Analog BIST Functionality for Microhotplate Temperature Sensors, IEEE Electron Device Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902033 (Accessed April 19, 2024)

Created September 1, 2009, Updated February 19, 2017