All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement
John M. Moreland, Pavel Kabos, Albrecht Jander
We have developed a micromachined bimaterial cantilever with a thin-film ferromagnetic resonance (FMR) sensor to probe rf fields near microwave devices. A patterned permalloy film deposited at the tip of the cantilever serves as the localized FMR probe. Power absorption at the tip, under FMR conditions, results in a proportional bending of the bimaterial cantilever. The deflection of the cantilever is measured with an optical lever. The small dimensions of the probe (20 υm x 20υm x 0.05υm) allows for measurements of rf magnetic fields near microwave devices with 20υm resolution and minimal intrusion. The sensor is constructed of low-stress silicon nitride and low-temperature-deposited silicon oxide. The use of dielectric materials in the cantilever beam minimizes the background signal produced by eddy-current heating of the cantilever. Using this scanning FMR probe we have measured vector-component-resolved microwave field distributions near 500 υ wide stipline resonator driven at 9.15 GHz.
Tech. Dig., IEEE MEMS 2002 Conference
January 21-25, 2002
Las Vegas, NV, USA
The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems
, Kabos, P.
and Jander, A.
All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement, Tech. Dig., IEEE MEMS 2002 Conference, Las Vegas, NV, USA
(Accessed March 4, 2024)