Davies, A.
, Tarrio, C.
and Evans, C.
(2001),
Advanced Optics Characterization, Optics and Photonics News
(Accessed May 9, 2025)
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Advanced Optics Characterization
Published
Author(s)
, ,
Abstract
Science, commerce, and defense continuously drive the optical community to provide less expensive, more perfect products. High performance optical systems always demand tighter tolerances-and tighter tolerances drive the need for ever better metrology. Aspheric optics, shorter wavelengths and resonant systems enable high performance, and make the metrologist''s life more difficult. Two of the recent drivers of tighter optical tolerances have been Extreme Ultra Violet Lithography (EUVL) and the Laser Interferometric Gravitational-wave Observatory (LIGO).Citation
Optics and Photonics News
Volume
12
Issue
No. 2
Pub Type
Others
Keywords
extreme ultraviolet, interferometry, lithography, metrology, reflectometry
Citation
Issues
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Created February 1, 2001, Updated February 19, 2017