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Accurate Picoscale Forces for Insitu Calibration of AFM

Published

Author(s)

Koo-Hyun Chung, Gordon A. Shaw, Jon R. Pratt

Abstract

The force sensitivity of an atomic force microscope is calibrated directly using an in situ realization of primary electrostatic forces ranging from 320 pN to 3.3 nN with accuracy of a few percent. The absolute accuracy of a common atomic force microscope (AFM) force calibration scheme, known as the thermal noise method is evaluated via comparison to the electrostatic calibration. It is demonstrated that the thermal noise method can be applied with great success to yield force measurements with relative standard uncertainties below 5% after application of a geometric correction factor.
Proceedings Title
XIX IMEKO World Congress: Fundamental and Applied Metrology
Conference Dates
September 6-11, 2009
Conference Location
Lisbon
Conference Title
IMEKO XIX World Congress Fundamental

Keywords

Electrostatic, Atomic Force Microscope, Piconewton.

Citation

Chung, K. , Shaw, G. and Pratt, J. (2009), Accurate Picoscale Forces for Insitu Calibration of AFM, XIX IMEKO World Congress: Fundamental and Applied Metrology, Lisbon, -1 (Accessed April 17, 2024)
Created September 3, 2009, Updated February 19, 2017