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PUBLICATIONS

AC Impedance Method for High-Resistivity Measurements of Silicon

Published

Author(s)

W. R. Thurber, J R. Lowney, Robert D. Larrabee, James R. Ehrstein
Citation
Journal of the Electrochemical Society
Volume
138
Issue
10
Pub Type
Journals

Citation

Thurber, W. , Lowney, J. , Larrabee, R. and Ehrstein, J. (1991), AC Impedance Method for High-Resistivity Measurements of Silicon, Journal of the Electrochemical Society (Accessed May 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 30, 1991, Updated October 12, 2021