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AC Impedance Method for High-Resistivity Measurements of Silicon
Published
Author(s)
W. R. Thurber, J R. Lowney, Robert D. Larrabee, James R. Ehrstein
Citation
Journal of the Electrochemical Society
Volume
138
Issue
10
Pub Type
Journals
Citation
Thurber, W.
, Lowney, J.
, Larrabee, R.
and Ehrstein, J.
(1991),
AC Impedance Method for High-Resistivity Measurements of Silicon, Journal of the Electrochemical Society
(Accessed October 3, 2023)