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AC Impedance Method for High-Resistivity Measurements of Silicon

Published

Author(s)

W. R. Thurber, J R. Lowney, Robert D. Larrabee, James R. Ehrstein
Citation
Journal of the Electrochemical Society
Volume
138
Issue
10

Citation

Thurber, W. , Lowney, J. , Larrabee, R. and Ehrstein, J. (1991), AC Impedance Method for High-Resistivity Measurements of Silicon, Journal of the Electrochemical Society (Accessed April 14, 2024)
Created September 30, 1991, Updated October 12, 2021