TY  - JOUR
AU  - W. Thurber
AU  - J Lowney
AU  - Robert Larrabee
AU  - James Ehrstein
C2  - Journal of the Electrochemical Society
DA  - 1991-10-01 00:10:00
LA  - en
M1  - 138
PB  - Journal of the Electrochemical Society
PY  - 1991
TI  - AC Impedance Method for High-Resistivity Measurements of Silicon
ER  -