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Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon

Published

Author(s)

S Djurovi, J R. Roberts, M A. Sobolewski, James K. Olthoff
Citation
Journal of Research (NIST JRES) -
Volume
98

Citation

Djurovi, S. , Roberts, J. , Sobolewski, M. and Olthoff, J. (1993), Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 15, 2024)
Created December 31, 1992, Updated October 12, 2021