3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties
Jing Qin, Hui Zhou, Bryan M. Barnes, Ronald G. Dixson, Richard M. Silver
A new approach that involves parametric fitting of 3-D scattered field with electromagnetic simulation, Fourier domain normalization, and uncertainties analysis is presented to rigorously analyze 3-D through-focus optical images of targets that scatter a continuum of frequency components
OSA Technical Digests
June 24-28, 2013
Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
, Zhou, H.
, Barnes, B.
, Dixson, R.
and Silver, R.
3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties, OSA Technical Digests, Alexandria, VA, [online], https://doi.org/10.1364/AOPT.2013.JTu4A.32
(Accessed December 2, 2023)