We describe the design, development and performance of a scanning probe microscopy (SPM) facility operating at a base temperature of 10 mK in magnetic fields up to 15 T. The microscope is cooled by a custom designed, fully ultra-high vacuum (UHV) compatible dilution refrigerator and is capable of in-situ tip and sample exchange. Sub-picometer stability at the tip-sample junction is achieved through three independent vibration isolation stages and careful design of the dilution refrigerator. The system can be connected to, or disconnected from, a network of interconnected auxiliary UHV chambers for tip/sample preparations and analysis. These include MBE growth chambers for metal and semiconductor samples, a field ion microscope for tip characterization, and a fully independent quick access STM/AFM system. We present cooling performance, noise measurements, and high energy resolution tunneling spectroscopy results on SiC grown epitaxial graphene.
Citation: Review of Scientific Instruments
Pub Type: Journals
scanning probe microscopy, scanning tunneling microscopy, cryogenic, dilution refrigerator