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Conferences

Acid Gas Production in Inhibited Diffusion Flames

Author(s)
Gregory T. Linteris, M D. King, A Liu, C A. Womeldorf, Y. E. Hsin
The proposed replacements to halon 1301, mainly fluorinated and chlorinated hydrocarbons, are expected to be required in significantly higher concentrations

A Monte Carlo Model for SEM Linewidth Metrology

Author(s)
J R. Lowney, Michael T. Postek, Andras Vladar
A scanning electron microscope (SEM) can be used to measure the dimensions of the microlithographic features of integrated circuits. However, without a good
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