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Yang Li (IntlAssoc)

Publications

Wafer-scale fabrication of evacuated alkali vapor cells

Author(s)
Yang Li, Matthew Hummon, Susan Schima, John Kitching, DONGGYU SOHN
We describe a process for fabricating a wafer-scale array of alkali metal vapor cells with low residual gas pressure. We show that by etching long, thin
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Created July 24, 2021, Updated December 9, 2022
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