William A. Kimes

Publications

Comparison of saturator designs for low volatility liquid precursor delivery

April 1, 2023

Author(s)

James E. Maslar, William A. Kimes, Vladimir B. Khromchenko, Brent Sperling, Ravindra Kanjolia

Low volatility precursors are widely utilized in chemical vapor deposition and atomic layer deposition processes. Such precursors are often delivered from one

Certification of NIST Gas Mixture Standard Reference Materials

February 10, 2022

Author(s)

Christina Cecelski, Kimberly Harris, Cassie Goodman, William A. Kimes, Philip Liu, Walter R. Miller Jr., Jennifer Carney

The Gas Sensing Metrology Group at NIST provides accurate, stable gaseous standards for use in various types of emissions testing and environmental monitoring

Characterization of vapor draw vessel performance for low-volatility solid precursor delivery

December 10, 2020

Author(s)

James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia

Low volatility precursors are widely utilized in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. Compared to gases and high

Non-dispersive infrared gas analyzer for partial pressure measurements of a tantalum alkylamide during vapor deposition processes

August 24, 2020

Author(s)

James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia

A non-dispersive infrared (NDIR) gas analyzer was demonstrated for investigating metal alkylamide precursor delivery for microelectronics vapor deposition

Characterization of bubbler performance for low-volatility liquid precursor delivery

June 27, 2019

Author(s)

James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia

The performance of a bubbler to deliver the low-volatility, liquid cobalt precursor μ2- η2-(tBu- acetylene) dicobalthexacarbonyl (CCTBA) for reduced-pressure

View more Publications

William A. Kimes (Fed)

Publications