Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Li-Anne Liew (Fed)

Research Interests: 

Microscale mechanical testing of bulk materials; chip-scale instruments for testing of bulk materials; MEMS-based gas compressors for chip-scale refrigeration cooling systems and thermal management; flexible thermal ground planes; microsystems design, fabrication, packaging; MEMS sensors and actuators for harsh environments; atomic layer deposited films and polymer derived ceramics for microsystems, cryogenic MEMS.

Project leader, MEMS & micromechanics  

Professional Affiliations: 

  • American Society of Mechanical Engineers
  • International Microelectronics Assembly and Packaging Society
  • IEEE  

Professional Activities:

  • Track co-chair - International Conference and Exhibition on Device Packaging (International Microelectronics Assembly and Packaging Society) (2017-2019)
  • Technical committee - International Conference and Exhibition on Device Packaging (International Microelectronics Assembly and Packaging Society) (2010 - 2019)
  • Industry-academia consulting (2009 - 2016) 

Other Recent Publications:

L.A. Liew, C.Y. Lin, R. Lewis, S. Song, Q. Li, R. Yang, Y.C. Lee, “Flexible thermal ground planes fabricated with printed circuit board technology,” J. Electronic Packaging, Vol 139, no. 1, art. No. 011003, 2017.

A. Yersak, R. Lewis, L.A. Liew, R. Wen, R. Yang, Y.C. Lee, “Atomic layer deposited coatings on nanowires for high temperature water corrosion protection,” ACS App Materials and Interfaces, Vol 8, no 27, pp. 3216-32623, 2016

S.S. Xu, R.J. Lewis, L.A. Liew, Y.C. Lee, R.G. Yang, “Development of ultra-thin thermal ground planes by using stainless-steel mesh as wicking structure,” J. Microelectromechanical Systems, vol. 25, no 5, pp. 842-844, 2016.

L. Zoli, D. Sciti, D, L.A. Liew, K. Terauds, S. Azarnoush, and R. Raj,  “Additive manufacturing of ceramics enabled by flash pyrolysis of polymer precursors with nanoscale layers,”. J. Am. Ceram. Soc., 99: 57–63. doi:10.1111/jace.13946 , 2015.

R. Lewis, S.S. Xu, L.A. Liew, C. Coolidge, R. Yang, Y.C. Lee, “Thin flexible thermal ground planes: fabrication and scaling characterization,” J. Microelectromechanical Systems, Vol 24, no 6, pp. 2040-2038, 2015.


  • NIST EEEL Directors Reserve Competitive Funding grant (2007-2008)
  • Department of Commerce Silver Medal (2005)  
  • National Research Council Postdoctoral Fellowship (2003-2005)
  • Best Paper of Session Award, 35th International Symposium on Microelectronics (International Microelectronics and Packaging Society, 2002)


Created May 21, 2019, Updated September 23, 2023