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Li-Anne Liew

Research Interests: 

Micro scale mechanical testing of bulk materials; chip-scale instruments for testing of bulk materials; MEMS-based gas compressors for chip-scale refrigeration cooling systems and thermal management; flexible thermal ground planes; microsystems design, fabrication, packaging; MEMS sensors and actuators for harsh environments; atomic layer deposited films and polymer derived ceramics for microsystems

Professional Affiliations: 

  • American Society of Mechanical Engineers
  • International Microelectronics and Packaging Society
  • IEEE  

Professional Activities:

  • Track co-chair - International Conference and Exhibition on Device Packaging (International Microelectronics Assembly and Packaging Society) (2017-present)
  • Technical committee - International Conference and Exhibition on Device Packaging (International Microelectronics Assembly and Packaging Society)  (2010 - present)
  • Industry-academia consulting (2009 - 2016) 


Other recent publications

L.A. Liew, C.Y. Lin, R. Lewis, S. Song, Q. Li, R. Yang, Y.C. Lee, “Flexible thermal ground planes fabricated with printed circuit board technology,” J. Electronic Packaging, Vol 139, no. 1, art. No. 011003, 2017.

A. Yersak, R. Lewis, L.A. Liew, R. Wen, R. Yang, Y.C. Lee, “Atomic layer deposited coatings on nanowires for high temperature water corrosion protection,” ACS App Materials and Interfaces, Vol 8, no 27, pp. 3216-32623, 2016

S.S. Xu, R.J. Lewis, L.A. Liew, Y.C. Lee, R.G. Yang, “Development of ultra-thin thermal ground planes by using stainless-steel mesh as wicking structure,” J. Microelectromechanical Systems, vol. 25, no 5, pp. 842-844, 2016.

L. Zoli, D. Sciti, D, L.A. Liew, K. Terauds, S. Azarnoush, and R. Raj,  “Additive manufacturing of ceramics enabled by flash pyrolysis of polymer precursors with nanoscale layers,”. J. Am. Ceram. Soc., 99: 57–63. doi:10.1111/jace.13946 , 2015.

R. Lewis, S.S. Xu, L.A. Liew, C. Coolidge, R. Yang, Y.C. Lee, “Thin flexible thermal ground planes: fabrication and scaling characterization,” J. Microelectromechanical Systems, Vol 24, no 6, pp. 2040-2038, 2015.


  • NIST EEEL Directors Reserve Competitive Funding grant (2007-2008)
  • Department of Commerce Silver Medal (2005)  
  • National Research Council Postdoctoral Fellowship (2003-2005)
  • Best Paper of Session Award, 35th International Symposium on Microelectronics (International Microelectronics and Packaging Society, 2002)


MEMS-based universal fatigue test technique

Li-Anne Liew, David T. Read, Nicholas Barbosa
We have developed a MEMS (micro electro mechanical systems) -based method for fatigue testing of micro- to millimeter-sized specimens of any material (hence
Created May 21, 2019, Updated August 19, 2019