James E Proctor

Publications

Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process

April 01, 2004

Author(s):

Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai

Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate...

Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control

January 01, 2004

Author(s):

K G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, W A. Kimes, D C. Ripple, Benjamin K. Tsai

FASCAL 2: A New NIST Facility for the Calibration of the Spectral Irradiance of Sources

February 01, 2003

Author(s):

Howard W. Yoon, J E. Proctor, Charles E. Gibson

The Facility for Automated Spectroradiometric Calibrations (FASCAL) is the primary facility for spectral irradiance and spectral radiance calibrations at NIST...

FASCAL 2: A New NIST Facility for the Spectral Irradiance Calibrations of Sources

January 01, 2003

Author(s):

Howard W. Yoon, J E. Proctor, Charles E. Gibson

Polarization Characteristics of Silicon Photodiodes and Its Dependence on Oxide Thickness in the Far UV Region

January 01, 1996

Author(s):

T Saito, L R. Hughey, J E. Proctor, Thomas R. O'Brian