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Superconformal filling of fine features by electrodeposition and chemical vapor deposition is explained based on a single model that accounts for increase of
Daniel Wheeler, Trevor Keller, Jonathan E. Guyer, James A. Warren, Stephen DeWitt, Andrea Jokisaari, Daniel Schwen, Larry Aagesen, Olle Heinonen, Michael Tonks, Peter Voorhees
An online portal provides a valuable space for scientific communities to summarize a shared challenge, collect attempts at a solution, and present a
James A. Warren, Daniel Wheeler, David Brough, Surya Kalidindi
This paper develops and demonstrates a novel data science framework for capturing and communicating critical information regarding the evolution of material
There is a critical need for customized analytics that take into account the stochastic nature of materials internal structure at multiple length scales in
Extreme bottom-up superfilling of annular through-silicon-vias (TSV) during copper electrodeposition has been reported wherein metal deposits on the bottom