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Reticulated Resonator, Process for Making and Use of Same

Patent Number: 10,444,431


A reticulated resonator includes: a reticulated substrate that includes: a substrate frame; and a phononic structure in mechanical communication with the substrate frame and including a plurality of unit members arranged in a two-dimensional array; and a membrane disposed on the reticulated substrate. A process for producing a membrane frequency includes: providing a reticulated resonator including: a substrate frame; a phononic structure including: a first link connected to the substrate frame; a plurality of unit members arranged in a two-dimensional array and connected to the first link and in mechanical communication with the substrate frame through the first link; and a second link connected to the unit members; a membrane frame connected to the second link and in mechanical communication with the unit members through the second link; and a membrane disposed on the membrane and in mechanical communication with the substrate frame through the membrane frame and the unit members; subjecting the membrane to an excitation frequency; receiving, by the membrane, the excitation frequency; and producing, by the membrane, a membrane mode including a membrane frequency in response to receiving the excitation frequency.

Patent Description

Mechanical resonators are widely used in wireless receivers, bio sensors, and timing and frequency control. Besides industry, in recent years in academia there is also considerable interest for ultrahigh precision sensing and fundamental science. A mechanical resonator with the following three advantages is desirable for both industrial and academic applications:

1) high quality factor (Q)-frequency products

2) high stability, i.e. consistent performance over time

 3) easy to pack

The invented system has a Q- frequency product that is superior to high-stability quartz oscillators. Its performance is robust to aging and packaging. Specifically, the invented system has two components:

1) a high tensile stress resonator

2) a periodic supporting substrate that forms an acoustic metamaterial, i.e. phononic band gap

The entire structure - resonator and supporting substrate - can be made in a single microfabricated chip.  The figure below illustrates this structure where the parts are labeled as follows: membrane (102), membrane frame (104, photonic structure (106), substrate frame (108), aperture (110), wall (112), unit cells (114), reticulation gaps (116), reticulation aperture (118), reticulation protrusion (120), wall (122), unit member (124), and link (126).

A line drawing showing the entire structure, which includes the resonator and supporting substrate.


Micro- and nano-mechanical resonators offer great potential for precision sensing and realizing non-classical states of relatively massive objects.

Created March 12, 2020, Updated April 11, 2024