A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps

Richard A. Allen; Michael W. Cresswell; Laurence M. Buck

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PUBLICATIONS

A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps

Published

June 1, 1992

Author(s)

Richard A. Allen, Michael W. Cresswell, Laurence M. Buck

Citation

IEEE Electron Device Letters

Volume

Issue

Pub Type

Journals

Citation

Allen, R. , Cresswell, M. and Buck, L. (1992), A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps, IEEE Electron Device Letters (Accessed June 1, 2026)

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Created May 31, 1992, Updated October 12, 2021

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