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PUBLICATIONS

Ultra-Thin Film Dielectric Reliability Characterization

Published

Author(s)

John S. Suehle
Citation
Gate Dielectric Integrity
Publisher Info
American Society for Testing and Materials, West Conshohocken, PA
Pub Type
Books

Citation

Suehle, J. (2000), Ultra-Thin Film Dielectric Reliability Characterization, American Society for Testing and Materials, West Conshohocken, PA (Accessed December 31, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 2000, Updated January 27, 2020
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