Larson, D.
and Veasey, D.
(1992),
Localized Plasma Etching for Device Optimization, Journal of Vacuum Science and Technology (Accessed October 5, 2026)
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Localized Plasma Etching for Device Optimization
Published
Author(s)
, D. L. Veasey
Citation
Journal of Vacuum Science and Technology
Volume
10
Issue
1
Pub Type
Journals
Citation
Issues
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Created November 30, 1992, Updated October 12, 2021