NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI

Published

Author(s)

X. F. Zong, David G. Seiler, L. G. Song
Citation
Asia-Pacific Microanalysis Association
Publisher Info
, Shanghai, CH
Pub Type
Books

Citation

Zong, X. , Seiler, D. and Song, L. (1997), Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI, , Shanghai, CH (Accessed October 21, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 30, 1997, Updated October 12, 2021
Was this page helpful?