TY  - SER
AU  - Zong, X.
AU  - Seiler, David
AU  - Song, L.
C2  - ,  Shanghai, CH
DA  - 1997-12-01 00:12:00
LA  - en
PB  - ,  Shanghai, CH
PY  - 1997
TI  - Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI
ER  -