TY  - SER
AU  - X. Zong
AU  - David Seiler
AU  - L. Song
C2  - ,  Shanghai, CH
DA  - 1997-12-01 00:12:00
LA  - en
PB  - ,  Shanghai, CH
PY  - 1997
TI  - Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI
ER  -